专利名称:Optical displacement measuring instrument发明人:Yutaka Miki申请号:US12481040申请日:20090609公开号:US08134718B2公开日:20120313
专利附图:
摘要:A first light detector and a second light detector, in each of which a plurality oflight-receiving elements are arranged in an adjoining manner, are respectively providedanterior to an image-forming point of first reflected light and posterior to an image-forming point of second reflected light. A focal-point detecting circuit includes: maximum
value selectors for selecting the maximum values from sums of light-receiving signalsfrom adjoining light-receiving elements of the first light detector and the second lightdetector respectively; a total value operator for obtaining the total value of light-receiving signals from all the light-receiving elements of each of the first light detectorand the second light detector; a light-detecting-signal operator for obtaining light-detecting signals by subtracting the maximum values from the total values; and an error-signal operational circuit for outputting a difference between the light-detecting signalsto a servo circuit as a signal based on an amount of displacement between a focal pointand a measuring face.
申请人:Yutaka Miki
地址:Kawasaki JP
国籍:JP
代理机构:Greenblum & Bernstein, P.L.C.
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