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Optical displacement measuring instrument

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专利内容由知识产权出版社提供

专利名称:Optical displacement measuring instrument发明人:Yutaka Miki申请号:US12481040申请日:20090609公开号:US08134718B2公开日:20120313

专利附图:

摘要:A first light detector and a second light detector, in each of which a plurality oflight-receiving elements are arranged in an adjoining manner, are respectively providedanterior to an image-forming point of first reflected light and posterior to an image-forming point of second reflected light. A focal-point detecting circuit includes: maximum

value selectors for selecting the maximum values from sums of light-receiving signalsfrom adjoining light-receiving elements of the first light detector and the second lightdetector respectively; a total value operator for obtaining the total value of light-receiving signals from all the light-receiving elements of each of the first light detectorand the second light detector; a light-detecting-signal operator for obtaining light-detecting signals by subtracting the maximum values from the total values; and an error-signal operational circuit for outputting a difference between the light-detecting signalsto a servo circuit as a signal based on an amount of displacement between a focal pointand a measuring face.

申请人:Yutaka Miki

地址:Kawasaki JP

国籍:JP

代理机构:Greenblum & Bernstein, P.L.C.

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