Alignment method, alignment apparatus, and alignme

专利名称：Alignment method, alignment apparatus,

and alignment screen for objective-lensguiding device

发明人：Hirata, Tadashi申请号：EP07015199.8申请日：20070802公开号：EP125A2公开日：20080227

专利附图：

摘要：An end face of a narrow-diameter end portion is easily disposed at a correctposition on an examination object without setting an examination site, thus enabling rapid

and straightforward acquisition of an image of the examination site. The inventionprovides an alignment method for a guiding device which is attached to an end of anobjective lens in such a manner as to be capable of positional adjustment in an optical axisdirection and which is brought into contact with an examination target to make a focalposition of the objective lens coincident with an examination site. The alignment methodcomprises securing, to an end face of the guiding device, an alignment screen, having apredetermined pattern; relatively moving the objective lens and the guiding device, towhich the alignment screen is secured, in the optical axis direction; fixing relative positionsof the objective lens and the guiding device at a position where an in-focus image of thepattern of the alignment screen is obtained, or at a position further relatively shifted by apredetermined distance from that position; and removing the alignment screen from theguiding device.

申请人：Olympus Corporation

地址：43-2, Hatagaya 2-chome Shibuya-ku Tokyo 151-0072 JP

国籍：JP

代理机构：von Hellfeld, Axel

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