专利名称：INTEGRATED CIRCUIT CAPACITOR HAVING
ANTIREFLECTIVE DIELECTRIC
发明人：WOFFORD, BILL, ALLAN,PASKER, BLAKE,
RYAN,CHEN, XINFEN,HU, BINGHUA
申请号：EP06737456申请日：20060309公开号：EP1861875A4公开日：20110914
摘要：A capacitor (100) is disclosed that is formed as part of an integrated circuit (IC)fabrication process. The capacitor has conductive top and bottom electrodes (140, 144)and a nonconductive capacitor dielectric (142). In one example, the dielectric includes firstand second thin dielectric layers (112, 114) that sandwich a layer of antireflective material(118). The thin layers provide the dielectric behavior necessary for the capacitor while theantireflective layer promotes reduced feature sizes by mitigating reflected standingwaves, among other things.
申请人：TEXAS INSTRUMENTS INCORPORATED
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